Shallow source/drain extensions for deep submicron MOSFETs...

IEEE Transactions on Electron Devices 2003 Vol. 50; Iss. 5

Shallow source/drain extensions for deep submicron MOSFETs using spin-on-dopants

Gopalan, C., Chakraborty, P.S., Jinman Yang, Taehoon Kim, Zhiyuan Wu, McCartney, M.R., Goodnick, S.M., Kozicki, M.N., Thornton, T.J.
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Volume:
50
Year:
2003
Language:
english
Pages:
7
DOI:
10.1109/ted.2003.813467
File:
PDF, 363 KB
english, 2003
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