Self-aligned nickel, cobalt/tantalum nitride stacked-gate...

Self-aligned nickel, cobalt/tantalum nitride stacked-gate pMOSFETs fabricated with a low temperature process after metal electrode deposition

Pan, J., Woo, C., Ngo, M.-V., Chih-Yuh Yang, Besser, P., King, P., Bernard, J., Adem, E., Tracy, B., Pellerin, J., Qi Xiang, Ming-Ren Lin

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Volume:

Year:

2003

Language:

english

Pages:

DOI:

10.1109/ted.2003.819434

File:

PDF, 591 KB

english, 2003

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