High-performance and low-cost 0.15-μm nMOSFETs using...

IEEE Transactions on Electron Devices 2004 Vol. 51; Iss. 1

High-performance and low-cost 0.15-μm nMOSFETs using simultaneous N-gate and source/drain doping process

Han-Seob Cha, Won-Gyu Lee, Sang-Bum Heo, Hyuk-Hyun Ryu, Jong-Gon Lee, Jeong-Gun Lee, Hi-Deok Lee
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Volume:
51
Year:
2004
Language:
english
Pages:
6
DOI:
10.1109/ted.2003.820940
File:
PDF, 464 KB
english, 2004
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