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A self-aligned process for high-voltage, short-channel vertical DMOSFETs in 4H-SiC
Matin, M., Saha, A., Cooper, J.A., Jr.Volume:
51
Year:
2004
Language:
english
Pages:
5
DOI:
10.1109/ted.2004.835622
File:
PDF, 1.03 MB
english, 2004