Metal gate work function engineering on gate leakage of...

Metal gate work function engineering on gate leakage of MOSFETs

Yong-Tian Hou, Ming-Fu Li, Low, T., Dim-Lee Kwong
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Volume:
51
Year:
2004
Language:
english
Pages:
7
DOI:
10.1109/ted.2004.836544
File:
PDF, 524 KB
english, 2004
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