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RF figures-of-merit for process optimization
Hurkx, G.A.M., Agarwal, P., Dekker, R., van der Heijden, E., Veenstra, H.Volume:
51
Year:
2004
Language:
english
Pages:
8
DOI:
10.1109/ted.2004.838511
File:
PDF, 542 KB
english, 2004