A three-dimensional stacked fin-CMOS technology for high-density ULSI circuits
Xusheng Wu, Chan, P.C.H., Shengdong Zhang, Chuguang Feng, Chan, M.Volume:
52
Year:
2005
Language:
english
Pages:
6
DOI:
10.1109/ted.2005.854267
File:
PDF, 1.57 MB
english, 2005