Boron pocket and channel deactivation in nMOS transistors with SPER junctions
Duffy, R., Aboy, M., Venezia, V.C., Pelaz, L., Severi, S., Pawlak, B.J., Eyben, P., Janssens, T., Vandervorst, W., Loo, J., Roozeboom, F.Volume:
53
Year:
2006
Language:
english
Pages:
7
DOI:
10.1109/ted.2005.860651
File:
PDF, 954 KB
english, 2006