Investigation of transient relaxation under static and dynamic stress in Hf-based gate oxides
Akbar, M.S., Changhwan Choi, Se Jong Rhee, Krishnan, S.A., Chang Yong Kang, Man Hong Zhang, Tackhwi Lee, Ok, I., Feng Zhu, Hyoung-Sub Kim, Lee, J.C.Volume:
53
Year:
2006
Language:
english
Pages:
8
DOI:
10.1109/ted.2006.872886
File:
PDF, 607 KB
english, 2006