Work Function Tuning and Material Characteristics of Lanthanide-Incorporated Metal Nitride Gate Electrodes for NMOS Device Applications
Chi Ren, Chan, D.S.H., Ming-Fu Li, Wei-Yip Loh, Balakumar, S., Chih Hang Tung, Balasubramanian, N., Dim-Lee KwongVolume:
53
Year:
2006
Language:
english
Pages:
8
DOI:
10.1109/ted.2006.878017
File:
PDF, 397 KB
english, 2006