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Quantitative Analysis of 2-D Electrostatic Potential Distributions in 90-nm Si pMOSFETs Using Off-Axis Electron Holography
Myung-Geun Han, Fejes, P., Qianghua Xie, Bagchi, S., Taylor, B., Conner, J., McCartney, M.R.Volume:
54
Year:
2007
Language:
english
Pages:
6
DOI:
10.1109/ted.2007.908901
File:
PDF, 593 KB
english, 2007