Strained -MOSFET With Embedded Source/Drain Stressors and...

Strained -MOSFET With Embedded Source/Drain Stressors and Strain-Transfer Structure (STS) for Enhanced Transistor Performance

Kah-Wee Ang, Jianqiang Lin, Chih-Hang Tung, Balasubramanian, N., Samudra, G.S., Yee-Chia Yeo
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Volume:
55
Year:
2008
Language:
english
Pages:
8
DOI:
10.1109/ted.2007.915053
File:
PDF, 631 KB
english, 2008
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