Strained CMOS Devices With Shallow-Trench-Isolation Stress...

IEEE Transactions on Electron Devices 2008 Vol. 55; Iss. 4

Strained CMOS Devices With Shallow-Trench-Isolation Stress Buffer Layers

Yiming Li, Hung-Ming Chen, Shao-Ming Yu, Jiunn-Ren Hwang, Fu-Liang Yang
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Volume:
55
Year:
2008
Language:
english
Pages:
5
DOI:
10.1109/ted.2008.916708
File:
PDF, 647 KB
english, 2008
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