Ultralow-Thermal-Budget CMOS Process Using Flash-Lamp...

IEEE Transactions on Electron Devices 2008 Vol. 55; Iss. 4

Ultralow-Thermal-Budget CMOS Process Using Flash-Lamp Annealing for 45 nm Metal/High- FETs

Ootsuka, F., Katakami, A., Shirai, K., Watanabe, T., Nakata, H., Kitajima, M., Aoyama, T., Eimori, T., Nara, Y., Ohji, Y., Tanjyo, M.
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Volume:
55
Year:
2008
Language:
english
Pages:
8
DOI:
10.1109/ted.2008.917546
File:
PDF, 918 KB
english, 2008
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