Uniform Square Polycrystalline Silicon Fabricated by Employing Periodic Metallic Pads and SiON Absorption Layer for Thin Film Transistors
Po-Chuan Yang, Chun-Yuan Hsueh, Chieh-Hung Yang, Jeng-Han Lee, Hui-Wen Lin, Hsu-Yu Chang, Chi-Yang Chang, Si-Chen LeeVolume:
55
Year:
2008
Language:
english
Pages:
6
DOI:
10.1109/ted.2008.925921
File:
PDF, 780 KB
english, 2008