Gate-Induced Drain Leakage (GIDL) Improvement for Millisecond Flash Anneal (MFLA) in DRAM Application
Shian-Jyh Lin, Chao-Sung Lai, Yi-Jung Chen, Sheng-Tsung Chen, Chia Chuan Hsu, Huang, B., Chuang, G., Neng-Tai Shih, Chung-Yuan Lee, Pei-Ing LeeVolume:
56
Year:
2009
Language:
english
Pages:
10
DOI:
10.1109/ted.2009.2022689
File:
PDF, 1.74 MB
english, 2009