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Stress Memorization Technique—Fundamental Understanding and Low-Cost Integration for Advanced CMOS Technology Using a Nonselective Process
Ortolland, C., Okuno, Y., Verheyen, P., Kerner, C., Stapelmann, C., Aoulaiche, M., Horiguchi, N., Hoffmann, T.Volume:
56
Year:
2009
Language:
english
Pages:
8
DOI:
10.1109/ted.2009.2024021
File:
PDF, 1.81 MB
english, 2009