High-Resistivity Thin-Film Resistors Grown Using –Si–SiC...

IEEE Transactions on Electron Devices 2010 Vol. 57; Iss. 6

High-Resistivity Thin-Film Resistors Grown Using –Si–SiC Materials by Radio-Frequency Magnetron Sputtering

Kyoung-Woo Park, Sung-Gi Hur, Jun-Ku Ahn, Nak-Jin Seong, Soon-Gil Yoon
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Volume:
57
Year:
2010
Language:
english
Pages:
6
DOI:
10.1109/ted.2010.2045673
File:
PDF, 704 KB
english, 2010
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