Effects of Plasma Treatment on the Electrical...

IEEE Transactions on Electron Devices 2010 Vol. 57; Iss. 7

Effects of Plasma Treatment on the Electrical Characteristics of Poly-Silicon TFTs Using a Gate Dielectric

Tung-Ming Pan, Zhi-Hong Li, Chih-Kang Deng
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Volume:
57
Year:
2010
Language:
english
Pages:
8
DOI:
10.1109/ted.2010.2047904
File:
PDF, 1.12 MB
english, 2010
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