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Electrical Characterization of Thin-Film Structures With Redeposited Sidewalls
Roy, D., in 't Zandt, M.A.A., Wolters, R.A.M.Volume:
58
Year:
2011
Language:
english
Pages:
7
DOI:
10.1109/ted.2010.2103318
File:
PDF, 806 KB
english, 2011