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Characterization of Enhanced Stress Memorization Technique on nMOSFETs by Multiple Strain-Gate Engineering
Tsung-Yi Lu, Tien-Shun Chang, Shih-An Huang, Tien-Sheng ChaoVolume:
58
Year:
2011
Language:
english
Pages:
6
DOI:
10.1109/ted.2011.2107324
File:
PDF, 514 KB
english, 2011