Symmetric Vertical-Channel Nickel-Salicided Poly-Si...

IEEE Transactions on Electron Devices 2011 Vol. 58; Iss. 7

Symmetric Vertical-Channel Nickel-Salicided Poly-Si Thin-Film Transistors With Self-Aligned Oxide Overetching Structures

Yi-Hong Wu, Po-Yi Kuo, Yi-Hsien Lu, Yi-Hsuan Chen, Tsung-Yu Chiang, Kuan-Ti Wang, Li-Chen Yen, Tien-Sheng Chao
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Volume:
58
Year:
2011
Language:
english
Pages:
6
DOI:
10.1109/ted.2011.2142312
File:
PDF, 967 KB
english, 2011
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