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On Different Process Schemes for MOSFETs With a Controllable NiSi-Based Metallic Source/Drain
Jun Luo, Dongping Wu, Zhijun Qiu, Jun Lu, Hultman, L., Ostling, M., Shi-Li ZhangVolume:
58
Year:
2011
Language:
english
Pages:
9
DOI:
10.1109/ted.2011.2145381
File:
PDF, 788 KB
english, 2011