Evaluation for Anomalous Stress-Induced Leakage Current of Gate Films Using Array Test Pattern
Kumagai, Y., Teramoto, A., Inatsuka, T., Kuroda, R., Suwa, T., Sugawa, S., Ohmi, T.Volume:
58
Year:
2011
Language:
english
Pages:
7
DOI:
10.1109/ted.2011.2161991
File:
PDF, 334 KB
english, 2011