Optical deflection measurement for characterization of...

Optical deflection measurement for characterization of microelectromechanical systems (MEMS)

Firebaugh, S.L., Charles, H.K., Jr., Edwards, R.L., Keeney, A.C., Wilderson, S.F.
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Volume:
53
Year:
2004
Language:
english
Pages:
5
DOI:
10.1109/tim.2004.831504
File:
PDF, 252 KB
english, 2004
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