Optical deflection measurement for characterization of microelectromechanical systems (MEMS)
Firebaugh, S.L., Charles, H.K., Jr., Edwards, R.L., Keeney, A.C., Wilderson, S.F.Volume:
53
Year:
2004
Language:
english
Pages:
5
DOI:
10.1109/tim.2004.831504
File:
PDF, 252 KB
english, 2004