A New High-Filling-Factor CMOS-Compatible Thermopile

IEEE Transactions on Instrumentation and Measurement 2007 Vol. 56; Iss. 4

A New High-Filling-Factor CMOS-Compatible Thermopile

Shu-Jung Chen, Chih-Hsiung Shen
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Volume:
56
Year:
2007
Language:
english
Pages:
8
DOI:
10.1109/tim.2007.899835
File:
PDF, 1.12 MB
english, 2007
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