ESD On-Wafer Characterization: Is TLP Still the Right...

ESD On-Wafer Characterization: Is TLP Still the Right Measurement Tool?

Scholz, M., Linten, D., Thijs, S., Sangameswaran, S., Sawada, M., Nakaei, T., Hasebe, T., Groeseneken, G.
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Volume:
58
Year:
2009
Language:
english
Pages:
9
DOI:
10.1109/tim.2009.2017657
File:
PDF, 537 KB
english, 2009
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