Investigation of high rate magnetron sputtering of niobium...

IEEE Transactions on Magnetics 1983 Vol. 19; Iss. 3

Investigation of high rate magnetron sputtering of niobium films for Josephson integrated circuits

Villegier, J., Veler, J.
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Volume:
19
Year:
1983
Language:
english
Pages:
5
DOI:
10.1109/tmag.1983.1062556
File:
PDF, 568 KB
english, 1983
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