Effect of substrate and deposition rate on DC magnetron...

IEEE Transactions on Magnetics 1986 Vol. 22; Iss. 5

Effect of substrate and deposition rate on DC magnetron sputtered Co-Cr thin films

Ravipati, D., Sivertsen, J., Judy, J.
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Volume:
22
Year:
1986
Language:
english
Pages:
3
DOI:
10.1109/tmag.1986.1064627
File:
PDF, 565 KB
english, 1986
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