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CoCr-sputtering in large scale roll coating systems
Mayr, M., Ludwig, R., Kastner, K., Kukla, R., Dalmann, B., Haberkorn, H., Hitzfeld, M.Volume:
23
Year:
1987
Language:
english
Pages:
3
DOI:
10.1109/tmag.1987.1065233
File:
PDF, 390 KB
english, 1987