Will the numbers add up for sub-7-nm magnetic spacings? Future metrology issues for disk drive lubricants, overcoats, and topographies
Mate, C.M., Qing Dai, Payne, R.N., Knigge, B.E., Baumgart, P.Volume:
41
Year:
2005
Language:
english
Pages:
6
DOI:
10.1109/tmag.2004.838057
File:
PDF, 796 KB
english, 2005