Damping effect on precise track following for nano-motion...

Damping effect on precise track following for nano-motion actuator

Mori, S., Tada, H., Naganawa, A., Obinata, G., Ouchi, K.
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Volume:
41
Year:
2005
Language:
english
Pages:
7
DOI:
10.1109/tmag.2004.840344
File:
PDF, 1.12 MB
english, 2005
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