Ion-Beam-Etched Profile Control of MTJ Cells for Improving the Switching Characteristics of High-Density MRAM
Takahashi, S., Kai, T., Shimomura, N., Ueda, T., Amano, M., Yoshikawa, M., Kitagawa, E., Asao, Y., Ikegawa, S., Kishi, T., Yoda, H., Nagahara, K., Mukai, T., Hada, H.Volume:
42
Year:
2006
Language:
english
Pages:
3
DOI:
10.1109/tmag.2006.878862
File:
PDF, 569 KB
english, 2006