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Design Assessments of a Refined DC Magnetron Sputter With Multiple Magnetron Arrangements
Cheng-Tsung Liu, Ming-Chih Lai, Chang-Chou HwangVolume:
46
Year:
2010
Language:
english
Pages:
4
DOI:
10.1109/tmag.2009.2037976
File:
PDF, 639 KB
english, 2010