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Incidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc
Wang, N., Komvopoulos, K.Volume:
48
Year:
2012
Language:
english
Pages:
1
DOI:
10.1109/tmag.2012.2190295
File:
PDF, 1.54 MB
english, 2012