Modeling and Waveform Optimization of a Nano-motion Piezo Stage
Merry, R.J.E., Maassen, M.G.J.M., van de Molengraft, M.J.G., van de Wouw, N., Steinbuch, M.Volume:
16
Year:
2011
Language:
english
Pages:
12
DOI:
10.1109/tmech.2010.2050209
File:
PDF, 1.01 MB
english, 2011