Novel High-Q MEMS Curled-Plate Variable Capacitors Fabricated in 0.35-μm CMOS Technology
Bakri-Kassem, M., Fouladi, S., Mansour, R.R.Volume:
56
Year:
2008
Language:
english
Pages:
12
DOI:
10.1109/tmtt.2007.914657
File:
PDF, 3.47 MB
english, 2008