Characterization of the Remote Plasma Generated in a Pulsed-DC Gas-Flow Hollow-Cathode Discharge
Paduraru, C., Becker, K.H., Belkind, A., Lopez, J.L., Gonzalvo, Y.A.Volume:
35
Year:
2007
Language:
english
Pages:
7
DOI:
10.1109/tps.2007.895230
File:
PDF, 445 KB
english, 2007