Dynamics of Cleaning and Rinsing of Micro and Nano Structures in Single-Wafer Cleaning Tools
Dhane, K., Jeongnam Han, Jun Yan, Mahdavi, O., Zamani, D., Vermeire, B., Shadman, F.Volume:
24
Year:
2011
Language:
english
Pages:
9
DOI:
10.1109/tsm.2010.2089542
File:
PDF, 1.29 MB
english, 2011