A Novel Array-Based Test Methodology for Local Process...

IEEE Transactions on Semiconductor Manufacturing 2011 Vol. 24; Iss. 2

A Novel Array-Based Test Methodology for Local Process Variation Monitoring

Tseng-Chin Luo, Chao, M.C.-T., Wu, M.S.-Y., Kuo-Tsai Li, Hsia, C.C., Huan-Chi Tseng, Fisher, P.A., Chuen-Uan Huang, Yuan-Yao Chang, Pan, S.C., Young, K.K.-L.
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Volume:
24
Year:
2011
Language:
english
Pages:
14
DOI:
10.1109/tsm.2010.2095891
File:
PDF, 1.74 MB
english, 2011
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