Nonlinear Sequential Bayesian Analysis-Based Decision Making for End-Point Detection of Chemical Mechanical Planarization (CMP) Processes
Zhenyu Kong, Beyca, O., Bukkapatnam, S.T., Komanduri, R.Volume:
24
Year:
2011
Language:
english
Pages:
10
DOI:
10.1109/tsm.2011.2164100
File:
PDF, 679 KB
english, 2011