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PZT-Based Piezoelectric MEMS Technology
Gabriel L. Smith, Jeffrey S. Pulskamp, Luz M. Sanchez, Daniel M. Potrepka, Robert M. Proie, Tony G. Ivanov, Ryan Q. Rudy, William D. Nothwang, Sarah S. Bedair, Christopher D. Meyer, Ronald G. PolcawicVolume:
95
Year:
2012
Language:
english
Pages:
1
DOI:
10.1111/j.1551-2916.2012.05155.x
File:
PDF, 3.84 MB
english, 2012