Gas plasma etching of PEO/PBT segmented block copolymer films
M. B. Olde Riekerink, M. B. Claase, G. H. M. Engbers, D. W. Grijpma, J. FeijenVolume:
65A
Year:
2003
Language:
english
Pages:
12
DOI:
10.1002/jbm.a.10520
File:
PDF, 472 KB
english, 2003