Thermal stability of a freestanding EUV filter under...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2012 / 05 Vol. 6; Iss. 3

Thermal stability of a freestanding EUV filter under long-term vacuum annealing at 700–1000°C

Gusev, S. A., Drozdov, M. N., Kluenkov, E. B., Lopatin, A. Ya., Luchin, V. I., Pariev, D. E., Pestov, A. E., Salashchenko, N. N., Tsybin, N. N., Chkhalo, N. I., Shmaenok, L. A.
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Volume:
6
Language:
english
Pages:
5
Journal:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/s1027451012060134
Date:
May, 2012
File:
PDF, 693 KB
english, 2012
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