Influence of optical properties of the SOI structure on the...

Russian Microelectronics 2012 / 01 Vol. 41; Iss. 1

Influence of optical properties of the SOI structure on the wafer temperature during rapid thermal annealing

V. I. Rudakov, V. V. Ovcharov, V. P. Prigara
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Volume:
41
Language:
english
Pages:
10
DOI:
10.1134/s1063739712010106
Date:
January, 2012
File:
PDF, 389 KB
english, 2012
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