Films based on the phases in the Si-C-N System: Part 1. Synthesis and characterization of bis(trimethylsilyl)ethylamine as a precursor
S. V. Sysoev, A. O. Kolontaeva, L. D. Nikulina, M. L. Kosinova, F. A. Kuznetsov, V. I. Rakhlin, A. V. Lis, M. G. VoronkovVolume:
38
Language:
english
Pages:
7
DOI:
10.1134/s1087659612010129
Date:
February, 2012
File:
PDF, 193 KB
english, 2012