Nanopatterning on silicon surface using atomic force...

Nanoscale Research Letters 2011 / 12 Vol. 6; Iss. 1

Nanopatterning on silicon surface using atomic force microscopy with diamond-like carbon (DLC)-coated Si probe

Xiaohong Jiang, Guoyun Wu, Jingfang Zhou, Shujie Wang, Ampere A Tseng, Zuliang Du
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Volume:
6
Language:
english
DOI:
10.1186/1556-276x-6-518
Date:
December, 2011
File:
PDF, 610 KB
english, 2011
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