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Ion mixing in multilayer films and the doping of the near-surface layers of polycrystalline substrates under irradiation by ion beams with a wide energy spectrum
Kalin, B. A., Volkov, N. V., Oleinikov, I. V.Volume:
76
Language:
english
Pages:
6
Journal:
Bulletin of the Russian Academy of Sciences: Physics
DOI:
10.3103/s1062873812060184
Date:
June, 2012
File:
PDF, 235 KB
english, 2012