Optimization of magnetron deposition process for formation of high-quality oriented ZnO films
E. R. Arakelova, A. M. Khachatryan, K. E. Avjyan, A. A. KteyanVolume:
47
Language:
english
Pages:
8
DOI:
10.3103/s1068337212040068
Date:
July, 2012
File:
PDF, 221 KB
english, 2012