Solid nanomembrane manufacture using ion-plasma action

Russian Aeronautics (Iz VUZ) 2012 / 01 Vol. 55; Iss. 1

Solid nanomembrane manufacture using ion-plasma action

S. Yu. Mikheev, I. I. Shkarban, Y. A. Ryzhov, S. A. Khartov, M. M. Gorshkov, R. P. Markov
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Volume:
55
Language:
english
Pages:
5
DOI:
10.3103/s1068799812010175
Date:
January, 2012
File:
PDF, 177 KB
english, 2012
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